China Turbo Molecular
Pump Factory
Yijin Hardware makes custom turbomolecular pumps using the latest Usinage CNC technology. We do this for semiconductor manufacturing, scientific research, and industrial vacuum uses. Our momentum transfer pumps get the best pressures below 10^-8 Torr with rotor-stator configurations and multi-stage compression systems. We deliver full vacuum services from the very first design consultation all the way down through to final testing and installation support. We are a leading vacuum pump supplier, ready to help you today.
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What are Turbomolecular Pumps?
Turbomolecular pumps are momentum transfer devices that get high vacuum conditions by sending kinetic energy to gas molecules. It does this through fast, rotating rotor blades mixed with red with stationary stator blades. These axial compressor vacuum pumps work completely opposite to normal turbines. This is because they add energy to gas rather than taking it away. The multi-stage design quickly compresses gas molecules from inlet pressures around 10^-3 Torr to super high vacuum pressures below 10^-8 Torr.
Core Operating Mechanisms
The rotor-stator blade configuration creates systematic compression through:
- Momentum Transfer: Gas molecules collide with rapidly moving rotor surfaces rotating at speeds up to 90,000 RPM
- Directional Flow: Angled blade geometry directs scattered molecules preferentially toward exhaust direction
- Progressive Compression: Multiple stages achieve compression ratios exceeding 10^8 for hydrogen molecules and 10^10 for N2
Backing Pump Integration
Turbomolecular pump systems require backing pumps including rotary vane, scroll vacuum pump, or dry screw pumps to:
- Evacuate compressed gas from exhaust port
- Maintain optimal fore-vacuum pump pressure conditions
- Enable pump startup from atmospheric pressure
Our Turbomolecular Pump Manufacturing Services
Yijin Hardware provides complete turbo molecular pump manufacturing services including custom design engineering, precision CNC machining, assembly, and performance testing. Our pump factory capabilities encompass rotor fabrication with tolerances of ±0.001 mm, stator housing machining, and integrated drive module assembly using 5-axis CNC centers. We deliver molecular vacuum pump solutions with high pumping speed ranging from 50 L/s to 5000 L/s for nitrogen gas with compression ratios exceeding 10^8 for hydrogen molecules.
CNC Precision Manufacturing Capabilities
| Composant | Tolérance | Finition de la surface | Matériau |
|---|---|---|---|
| Lames de rotor | ±0,001 mm | Ra 0,2 μm | Stainless Steel 316L |
| Boîtier du stator | ±0,005 mm | Ra 0,4 μm | Alliage d'aluminium 6061 |
| Bearing Seats | ±0.0005 mm | Ra 0.1 μm | Acier trempé |
| Throat Geometry | ±0,002 mm | Ra 0.3 μm | Vacuum-Compatible Alloys |
Quality Control Protocols
Our comprehensive testing includes:
- Coordinate measuring machine verification of critical dimensions
- Dynamic rotor balancing to eliminate vibration
- Vibration analysis, ensuring smooth operation at maximum speeds
- Clean room assembly preventing contamination for clean high vacuum applications
How do We Achieve Superior Pumping Performance Through CNC Precision?
Yijin Hardware achieves superior pumping performance through precision CNC machining of rotor blade profiles that optimize molecular collision angles and minimize turbulence in compression stages. Our 5-axis CNC centers machine rotor blades with surface finishes of Ra 0.2 μm and angular tolerances of ±0.01 degrees to ensure maximum momentum transfer efficiency. The precise blade geometry creates optimal throat configurations between adjacent rotor blades that direct gas molecules preferentially toward the exhaust direction.
Advanced Blade Geometry Optimization
Our turbo molecular vacuum pump designs incorporate computational fluid dynamics modeling to optimize blade curvatures for specific gas compositions and operating conditions.
High Compression Ratio Designs:
- Throat geometries between rotor blades point maximally in forward direction
- Blade curvatures optimized using finite element analysis
- Surface roughness prevents molecular reflection for efficient energy transfer
High Flow Rate Configurations:
- Blade positioning at 45-degree angles extending close to central axis
- Optimized clearances between rotor-stator components
- Custom blade thickness, balancing structural strength with aerodynamic efficiency
Manufacturing Process Excellence
Our precision manufacturing incorporates:
- Stress-relief heat treatment eliminating internal stresses
- Custom rotor designs for application-specific gas compositions
- Specialized coatings for enhanced vacuum compatibility
- Contamination control throughout assembly process, ensuring oil-free operation
Which Industries Benefit from Our Turbomolecular Pump Solutions?
Semiconductor manufacturing facilities utilize our turbo molecular vacuum pumps for physical vapor deposition (PVD) and chemical vapor deposition (CVD) processes requiring vacuum conditions below 10^-6 Torr. Our contamination-free operation ensures product quality in cleanroom environments where particle contamination damages semiconductor devices. Integration with electron beam systems enables precise thin film creation for integrated circuit fabrication and chip manufacturing applications.
Scientific Research Applications
Our quality turbo molecular pumps serve diverse research applications requiring precise vacuum control and contamination-free environments.
Particle Accelerator Systems:
- Elementary particle collision experiments requiring ultrahigh vacuum below 10^-9 Torr
- Vacuum chambers maintaining contamination-free environments
- Continuous operation supporting research schedules
Analytical Instrumentation:
- Electron microscopy systems for materials analysis
- Surface science equipment for atomic-level studies
- Quantum computation cryogenic chamber support with vacuum gauges integration
Industrial Manufacturing Processes
Advanced manufacturing applications with wide application range include:
- Electron beam welding systems for aerospace components
- Vacuum heat treatment furnaces with convenient operation
- Space simulation chambers for aerospace testing
- Glass industry vacuum coating processes
- Industrial plating systems requiring precise vacuum control
What Advanced Features Set Our Turbomolecular Pumps Apart?
Yijin Hardware integrates magnetic bearing technology eliminating mechanical contact between rotating and stationary components, resulting in vibration-free operation and extended bearing life. The electromagnetic bearing system, also called active magnetic levitated bearings, suspends the rotor assembly where shafting is supported by virtue of magnetic force, preventing oil contamination and achieving ultimate pressures below 5×10^-9 Torr without baking procedures. These magnetically levitated molecular pumps enable continuous operation in contamination-sensitive applications.
Intelligent Control Systems
| Fonctionnalité | Technologie | Bénéfice | Application |
|---|---|---|---|
| Variable Speed Control | Frequency Conversion | Optimisation spécifique au gaz | Multi-Component Systems |
| Real-Time Monitoring | Digital Sensors | Maintenance prédictive | Production Environments |
| Automatic Protection | Smart Controllers | Equipment Safeguarding | Unattended Operation |
| Remote Diagnostics | IoT Connectivity | Reduced Downtime | Global Installations |
Modular Design Advantages
Our pump systems feature compact structure with flexible installation options:
- Field-replaceable rotor assemblies, minimizing maintenance downtime
- Integrated cooling systems with pump water cooling and air cooling options
- Multiple flange configurations (ISO-K, ISO-F, CF)
- Customizable inlet orientations for vacuum systems integration
How do We Ensure Quality and Reliability in Manufacturing?
Yijin Hardware implements ISO 9001:2015 quality management systems throughout our china turbo molecular pump manufacturing process, including incoming material inspection, in-process quality control, and final performance testing. Our quality assurance protocols include coordinate measuring machine verification, material certification for vacuum-compatible alloys, and surface cleanliness verification using particle counting methods. Each pump receives individual performance testing documenting pumping speed curves, compression ratios, and ultimate pressure achievements.
Contamination Control Procedures
Our series of high-performance molecular pumps undergo rigorous contamination control to ensure optimal vacuum technology performance.
Clean Room Assembly:
- Class 1000 clean room environment preventing particle contamination
- Specialized handling procedures for vacuum-sensitive components
- Filtered air systems maintaining contamination-free conditions
Material Compatibility:
- Vacuum-compatible stainless steel 316L construction
- Low outgassing materials certified for ultrahigh vacuum
- Surface treatments eliminating virtual leaks
Reliability Testing Standards
Comprehensive validation includes:
- Accelerated life testing under simulated operating conditions
- Thermal cycling verifying performance stability
- Vibration testing, ensuring mechanical integrity at maximum rotating speed
- Leak testing confirming vacuum integrity to 10^-10 Torr·L/s
Why Choose Yijin Hardware for Turbomolecular Pump Manufacturing?
Yijin Hardware combines 15+ years of CNC machining expertise with specialized vacuum technology knowledge to deliver turbomolecular pump manufacturer’s excellence exceeding international performance standards. Our pump factory houses advanced 5-axis CNC centers, coordinate measuring machines, and clean room assembly areas specifically designed for precision vacuum component production. We achieve cost savings of 30-40% compared to European manufacturers while maintaining equivalent performance specifications and quality standards.
Our China turbomolecular technical capabilities include application analysis for system optimization, custom rotor design using computational fluid dynamics, backing pumps integration consultation, and installation guidance with commissioning support. We provide direct factory pricing without distributor markups, flexible capacity accommodating prototypes to production quantities, global shipping with precision component packaging, and 24/7 technical support for critical applications.
Ce que disent nos clients
China Turbo Molecular
Pump Factory FAQs
Our turbomolecular pumps achieve pumping speeds from 50 L/s to 5000 L/s for nitrogen gas, with compression ratios exceeding 10^8 for hydrogen and 10^10 for nitrogen molecules. Ultimate pressures reach below 5×10^-9 Torr without baking procedures in magnetic bearing designs and below 10^-8 Torr in conventional bearing configurations. Performance specifications vary based on rotor design, operating speed, and specific application requirements for different gas compositions.
We machine throat geometries between adjacent rotor blades with tolerances of ±0.002 mm using 5-axis CNC centers and specialized fixturing systems. Coordinate measuring machines verify all critical dimensions with surface finish measurements confirming Ra 0.3 μm quality. The precise throat configuration directs gas molecules maximally in the forward direction, while computational fluid dynamics modeling optimizes geometry for specific pumping applications and gas compositions.
Our turbomolecular pumps integrate with scroll pumps, rotary vane pumps, and dry roughing pumps depending on application requirements and contamination sensitivity. We provide complete system design including backing pump sizing calculations, vacuum line configurations, and control system integration. Technical support includes fore-vacuum pressure optimization, gas load analysis, and automated sequencing for unattended operation in production environments.
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